Lecture 46 (CHE 323) Lithography Defocus and DOF

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  • čas přidán 9. 09. 2024
  • Lithography: Defocus and DOF

Komentáře • 13

  • @ramasatya6317
    @ramasatya6317 Před 6 lety +4

    Sir, these are the best video lectures I have ever seen. Love the way you explain everything from the fundamental level in a most simplistic way.

  • @lothringerinjena
    @lothringerinjena Před 9 lety

    Great courses, great talk, very pedagogic. Hut ab! from a focused electron beam induced chemist.

  • @chct27
    @chct27 Před 5 lety

    nice sharing. thanks

  • @zhizhongchen7166
    @zhizhongchen7166 Před 2 lety

    Nice video. For the intensity equation shown at 21:12, can it be shown mathematically how the interference between +-1st orders cancels out the phase shift term? Why not a cos(2*deltaPhi) term there?

    • @ChrisMack
      @ChrisMack  Před 2 lety

      Yes, it can be shown that the phase term cancels out so long as the two orders are at + and - the same angle.

  • @calengr1
    @calengr1 Před 4 lety

    24:30 DoFocus; phase error 1/4 wavelenth

  • @amrahcanul5870
    @amrahcanul5870 Před 2 lety

    At 11:50 when you talk about a 90 deg phase shift "not interfering at all" resulting in no image, you mean they interfere destructively?

    • @amrahcanul5870
      @amrahcanul5870 Před 2 lety

      Never mind I watched the rest of the video, where you explain it a little more in depth :) at 22:12 you mention destructive interference.

  • @ChrisMack
    @ChrisMack  Před 9 lety

    PDF copies of all the slides in this course are available at:
    www.lithoguru.com/scientist/CHE323/course.html

    • @pravinrawat15
      @pravinrawat15 Před 3 lety

      is it after 90 everything will be wash out ? as mimimum value will come at pi

    • @ChrisMack
      @ChrisMack  Před 3 lety

      @@pravinrawat15 For dense lines and spaces, after 90 degrees the image reverses tone, where the lines look like spaces and vice versa.

  • @user-zz4xs9hc5e
    @user-zz4xs9hc5e Před 5 lety

    Could you make the vedio about how to figure out the DOF in two beam system? Thanks!

    • @ChrisMack
      @ChrisMack  Před 5 lety

      I haven't made a video, but this topic is covered in my book, Fundamental Principles of Optical Lithography.