Lecture 45 (CHE 323) Lithography Mask Illumination

[@jianweng5559]

great lectures! make complex concept straightforward

[@drted]

Great videos! I find them... illuminating. :)

[@susanzeng]

Great lectures! I wish that I found them earlier. I've watched all of them. Thank you Prof. Mack.

[@youngbull73]

Bought your book, your lectures are so good. Appreciate you

[@jasona481]

Thank you for sharing your knowledge. Very good lectures.

[@kiwi806]

these videos are saving my life lol

[@charlie5041]

GOOD i am researching souce mask optimization

[@ChrisMack]

PDF copies of all the slides in this course are available at:
www.lithoguru.com/scientist/CHE323/course.html

[@user-zz4xs9hc5e]

Great! Now I understand where 0.25lambda/NA comes from

[@user-zz4xs9hc5e]

Only know why the mask illumination patterns are off-axis in most cases from this lecture

[@pln255]

70 minute lecture.