Lecture 41 (CHE 323) Lithography Diffraction, part 1

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  • čas přidán 9. 09. 2024

Komentáře • 8

  • @kevinpark1779
    @kevinpark1779 Před 2 lety

    Prof. Mack, i really appreciate for all the materials you posted on youtube. These are very education for me and all my coworkers in semiconductor industry.

  • @user-zz4xs9hc5e
    @user-zz4xs9hc5e Před 5 lety +1

    Q1: When the imaging system has ideal lens, the only limitation comes from the diffraction
    Q2: spatial frequency (fx, fy) forms a transform cordinate of (x,y), which contains the information of diffraction angle theta.
    Q3: light propagates as a planner wave, each point can be regarded as a point light source and has its own propagating funtion, by adding up all the propagation functions, we can figure out the light distribution at any spatial position.
    Q4: With a specific mask pattern, we can figure out the mask transparent funciton tm(x,y), then do the fourier transform convert it to Tm(fx, fy), in which the fx,fy represent the componnet with different diffraction angles, and the amplitude represent the electric field amplitude of these component.

  • @matthiaspleil1314
    @matthiaspleil1314 Před 10 lety

    very nice lecture - you explain things very well - thank you!
    I was a semiconductor lithography/manager for 12 year and now teach technicians and run a NSF Center - the Southwest Center for Microsystems Education. I'm using your materials in my advanced fabrication/spc course. Wonderful stuff!

  • @MrAaaanil
    @MrAaaanil Před 6 lety

    Wonderful lectures Sir! NOthing can be a better explanation than this!! Salute Sir!!

  • @ChrisMack
    @ChrisMack  Před 9 lety +2

    PDF copies of all the slides in this course are available at:
    www.lithoguru.com/scientist/CHE323/course.html

  • @GauravKumar-nn5rc
    @GauravKumar-nn5rc Před rokem

    thanks

  • @davidlai3643
    @davidlai3643 Před 2 lety

    Excuse me. Question: Slide 10: The formular under "Equal lines and spaces", where the 1/p comes from?

  • @vikrampratapsingh6846

    tq😀