[EUVL Part5] EUV Resist

Join Semi Sherpa, your trusted guide through the semiconductor cosmos, for the grand finale of our enlightening EUV photolithography series. In this climactic episode, we shed light on the vital role of EUV photoresist materials in advancing semiconductor manufacturing. We start by unraveling the essence of conventional chemically amplified resists (CAR) developed for deep UV lithography, highlighting their foundational role in paving the way for first-generation EUV resists. Experience the profound shift from the predictable world of classical physics in DUV to the enigmatic quantum mechanics realm in EUV, exploring the stochastic effects in CAR. We then dive into Inpria's innovative metal oxide resist (MOR), leveraging tin atoms for exceptional EUV absorption, now spearheading advances in high-volume manufacturing. Finally, we address the challenging RLS trade-off, spotlighting three pioneering solutions among myriad cutting-edge approaches. For a thorough understanding, we highly recommend revisiting our earlier discussions on track equipment and lithography chemicals for optical UV lithography. This series is crafted to demystify the complex world of lithography, making intricate concepts accessible to all Silicon Pioneers. Prepare to embark on a knowledge-rich journey to the core of the photolithography universe. Below are the main chapters of this video. Click on any timestamp to jump directly to the desired chapter.
1. EUV-CAR Resist: Understanding Chemically Amplified Resist for EUV
[03:10] Understanding EUV CAR: Comparative analysis between CAR for DUV and EUV.
[06:50] Mechanisms of Photoacid Generation in EUV CARs: How photoacids are generated from a single EUV photon.
[10:15] 1st Generation EUV CAR: Features of Environmentally Stable CAR (ESCAP), Photo Decomposable Quencher (PDQ), and Fluorinated Photoacid Generator (F-PAG).
[14:05] Underlayer (UL) in EUV Resist: Comparison of roles between DUV BARC vs EUV UL.
[17:25] EUV-resist Specific Challenges: Addressing outgassing and out-of-band (OOB) radiation problems and their solutions.
2. Stochastic Effects Challenge: Exploring the Origins and Impacts of Stochastic Defects
[20:30] Photon Shot Noise (PSN) Challenges: Emerging challenges due to wavelength and dose differences from ArF to EUV.
[23:40] Stochastic Defects: Discussing stochastic printing failures even under optimal dose-focus process conditions.
[26:45] Origin of Stochastic Effects: Discreteness, randomness, and material inhomogeneity.
[31:15] RLS Triangle Tradeoff Challenge in EUV CAR: Exploring tradeoff behaviors and Z-factor for performance metrics.
[36:50] Newly Designed EUV CAR Resists: Enhancing EUV absorption and increasing photoacid generation.
3. Metal Oxide Resist (MOR): A New Generation of Resist Materials
[41:35] Metal-Containing Resist (MCR): Addressing the need for smaller and thinner resists to overcome pattern collapse.
[46:00] Inpria's Metal Oxide Resist (MOR): Utilizing tin atoms to enhance EUV absorption.
[48:05] Properties of Inpria's MOR: Negative resist by crosslink reaction.
[49:50] Advantages and Challenges of Inpria's MOR.
4. LER Smoothing Technologies: Reducing Line Edge Roughness to Minimize Stochastic Defects
[53:40] Challenging LWR Requirements: IRDS standards for sub-5nm devices.
[55:35] Addressing RLS Tradeoff in CAR Resists: Post-processing treatments and new CAR concepts.
[58:55] Multi Trigger Resist (MTR) from Irresistible Materials: Mechanism and performance.
[1:02:05] Photo-Sensitized CAR (PSCAR): Mechanism.
[1:05:35] Dry MOR Resist from LAM Research: Dry deposition and development process.

[@henriquesian3437]

I'm here just to say that this is at moment the best channel that i found on youtube about the litography theme 👏👏👏 Already subscribe and waiting for the new videos, despite the fact i'll never own a multi-million lithography machine, it's amazing to see how these things works! Thanks and keep going with the channel 😉👍

[@SemiSlides]

Thank you so much for your kind words! We're thrilled to hear that you find our channel to be the best on CZcams for lithography themes. Your support means a lot to us. And don't worry, we'll keep this secret about our channel being the best from Professor Chris Mack over at the Litho Guru channel!
We're currently working on content about CMP, but we'd love to know if there are specific aspects of lithography you're interested in learning more about. Thanks again for subscribing and for your enthusiasm. Stay tuned for more amazing content!

[@henriquesian3437]

​@@SemiSlidesHaha, I think Mr. Mack deserves to know how good he is at explaining this things! Tell him about my comment 😂.
And about your question: There are a lot of videos around this theme here on YT, but all the contents are just "the same"... your channel goes deep on the "technical thing", and this is what makes you different from the others. Keep going on this way, the internet is already full of generic information, but your content is rich!
Thank you for sharing your experience with us 🙏.

[@a1238071]

Thank for taking us through wonderful EUV journey. What’s the next series? I’m looking forward to it.

[@SemiSlides]

We're diving into the world of Chemical Mechanical Planarization (CMP) for our next series, shining a light on the semiconductor industry's unsung hero. Picture CMP as a spa day for semiconductors, buffing chips to high-performance perfection. As we gather insights and polish our content to a wafer-like sheen, we'll need a brief pause in our uploads, expecting a few months' hiatus.
Thanks for your patience! Prepare for a blend of tech insights sprinkled with humor that makes CMP as engaging as your morning coffee. Stay tuned for a series where science meets wit!

[@firenze114]

Thanks for making such a great video, could you please share the briefing from the video?

[@SemiSlides]

Ah, the age-old quest for a summary! While I'd love to condense the wisdom of the ages (or at least the wisdom of a few minutes of video) into a bite-sized treat for you, I must confess, my summarizing quill has temporarily run out of ink. My scribe duties are on a brief hiatus, as I'm currently enrolled in the 'Art of Elaboration'. But fear not, for the adventure of watching the video may yet reveal untold treasures. Who knows what enlightening secrets you'll uncover on this quest? 🧙‍♂️✨

[@CyrusTabery]

I think he was asking for the slides. This is the short version it is 3 decades of resist evolution in a short video.