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DTU Nanolab
Denmark
Registrace 16. 03. 2017
DTU Nanolab is the National Centre for Nanofabrication and Characterization, an open access facility allowing industry and academia to exploit the possibilities of nanofabrication and atomic resolution characterization by providing state-of-the-art equipment and expertise.
Video
Working with chemicals in the cleanroom in building 346
zhlédnutí 69Před 21 dnem
Introduction to safety when working with chemicals in the cleanroom in building 346 at DTU Nanolab
Cleanroom safety building 346
zhlédnutí 65Před 21 dnem
Introduction to safety at DTU Nanolab - a short description of how the cleanroom works and the safety issues you will meet.
Dry Etch TPT Lecture - 6 Equipment for dry etching at Nanolab
zhlédnutí 585Před 2 měsíci
In this video we give you an overview of the dry etch equipment we have here at DTU Nanolab. The overview is given in LabAdviser where you can always take a look at the updated version - if you have access to LabAdviser.
Dry Etch TPT Lecture - 5b Chamber conditioning and RF matching
zhlédnutí 742Před 2 měsíci
In this video we describe the importance of chamber conditioning and the importance of good RF matching.
Dry Etch TPT Lecture - 5 Process tuning - process parameters
zhlédnutí 969Před 2 měsíci
In this video we discuss the different equipment settings like chamber pressure, power to the plasma, gas flows and temperature and how they influence the etch characteristics.
Dry Etch TPT Lecture - 4 Etch Characteristics
zhlédnutí 980Před 2 měsíci
In this video some of the etch characteristics is discussed - that is, the result of the etching on the sample being etched. We look at the etch rate uniformity over the sample with respect to structure sizes and etch loading area. We also look at different etching profiles and discuss etch selectivity between different materials.
Dry Etch TPT Lecture - 3b The Bosch process
zhlédnutí 983Před 2 měsíci
In this video an etch mechanism called the Bosch process is explain in details. This is a passivation mechanism that is very important in silicon etching, especially deep silicon etching.
Dry Etch TPT Lecture - 3 Etch Mechanisms
zhlédnutí 1KPřed 2 měsíci
This video explains the etch mechanisms in plasma etching/reactive ion etching. First the chemical etch mechanism is explained and how to select the process gas(es). Then the physical and reactive ion mechanisms are explained and the role of the ions in these mechanisms. At last an introduction to the passivation mechanisms is given.
Dry Etch TPT Lecture - 1 Motivation
zhlédnutí 982Před 2 měsíci
This screencast video is the first lecture video on Dry Etching giving an introduction to dry etching and gives a motivation for when and why you need dry etching and why you need to learn more about this topic.
Dry Etch TPT Lecture - 2 Etch plasma and equipment layout
zhlédnutí 891Před 2 měsíci
This video explains how the reactive ion etcher is working and how the plasma and ion bombardment are generated.
Dry Etch TPT Lecture - 0 Introduction to Dry Etch Equipment
zhlédnutí 1,9KPřed 2 měsíci
This video presents one of our plasma etchers and shows the main elements of the machine.
Dry Etch TPT Training - ASE and AOE software: #4 The Bosch process
zhlédnutí 374Před 2 měsíci
The recipe shows how the Bosch process is set up in the recipe editor
Dry Etch TPT Training - ASE and AOE software: #7 Process log
zhlédnutí 309Před 2 měsíci
This video shows how to view the process log file after a process has been run on either the ASE or the AOE.
Dry Etch TPT Training - ASE and AOE software: #6 Removing a wafer from the load lock
zhlédnutí 304Před 2 měsíci
This video shows how to operate the transfer window in order to remove a wafer from the load lock.
Dry Etch TPT Training - ASE and AOE software: #5 Run a process
zhlédnutí 369Před 2 měsíci
Dry Etch TPT Training - ASE and AOE software: #5 Run a process
Dry Etch TPT Training - ASE and AOE software: #3 Recipe editor
zhlédnutí 421Před 2 měsíci
Dry Etch TPT Training - ASE and AOE software: #3 Recipe editor
Dry Etch TPT Training - ASE and AOE software: #2 Load and transfer
zhlédnutí 421Před 2 měsíci
Dry Etch TPT Training - ASE and AOE software: #2 Load and transfer
Dry Etch TPT Training - ASE and AOE software: #1 intro
zhlédnutí 541Před 2 měsíci
Dry Etch TPT Training - ASE and AOE software: #1 intro
Dry Etch TPT Training - ICP’s and Pegasus software: #5 Automatic processing at the DRIE-Pegasus
zhlédnutí 341Před 2 měsíci
Dry Etch TPT Training - ICP’s and Pegasus software: #5 Automatic processing at the DRIE-Pegasus
Dry Etch TPT Training - ICP’s and Pegasus software: #1 Overview
zhlédnutí 511Před 2 měsíci
Dry Etch TPT Training - ICP’s and Pegasus software: #1 Overview
Dry Etch TPT Training - ICP’s and Pegasus software: #2 Recipes
zhlédnutí 441Před 2 měsíci
Dry Etch TPT Training - ICP’s and Pegasus software: #2 Recipes
Dry Etch TPT Training - ICP’s and Pegasus software: #3 Running processes
zhlédnutí 383Před 2 měsíci
Dry Etch TPT Training - ICP’s and Pegasus software: #3 Running processes
Dry Etch TPT Training Introduction to wafer loading and temperature controller
zhlédnutí 1,1KPřed 2 měsíci
Dry Etch TPT Training Introduction to wafer loading and temperature controller
Dry Etch TPT Training - ICP’s and Pegasus software: #4 The Bosch processes
zhlédnutí 376Před 2 měsíci
Dry Etch TPT Training - ICP’s and Pegasus software: #4 The Bosch processes
Hi, thank you very much for the nice video. Is there a way to store also the U,V (or X,Y) position of the picture in the image, for example in the title?
so good
Great explanation and presentation. I have a small question, As you mentioned about coating imperfections like comets, streaks and non - uniformity etc; what are the different ways to visually inspect the wafer as the coating resin is clear liquid it will be really hard to differentiate before and after coating? how can we visually inspect the failure modes of coating? If you could answer that would be greatly appreciated. Thanks
thanks a lot for a detailed explanation sir.
very helpful!
Its a piece of beauty 😅
Nice video 😊
Hi, and thank you for making your safety videos available to the public - these are a fantastic resource! I wanted to ask about the gloves you use, are they the North Silver Shield ones and how do you ensure the cleanroom compatibility, do you pre-clean them or can you use them as provided by your vendor?
This woman should be a professional tutorial maker. All her videos are very well explained.
Lihography is such an interesting topic!
How to unlock the data zone? Because in our system right click of mouse is not working in the process you discussed.
I fall in love with this lab
That was kind of you to record this video, It is very helpful. thanks a lot.🌹
good new plant in india best reseach
thanks for knowledge sharing.
😉 ≋p≋r≋o≋m≋o≋s≋m
Very helpful and concise. Thank you very much!
Thnks
Great video!
This lab look cool do they teach corse in eglish
Thanks for the heads-up! Next time, please more fancy animations :-)
Very nice presentation
many thanks ！
Thank you for the video I have a few questions. 1. I am wondering what exactly bleaching is? Is it a diffusion? 2. I am wondering what polarity change would do to allow to make pr 3. What does dose mean in 13:12? Dose is said throughout the lecture but I dont understand the exact meaning Thanks again for the lecture
Thank you for the video 1.Does anyone know why SiOH is hydrophillic and SiH is Hydrophobic?? 2.and do we make the surface hydrophillic because hdms is also hydrophillic?
This series of videos was really helpful, thanks a lot.
Really helpful - very clear
VERY GOOD
Good lecture, thanks!
Really helpful for refreshing our memories. Mange tak!
very good presentation, can I know the name of the chemicals storage between the hoods and beside the shower???
The chemical storage cabinets were custom made by the manufacturer of the fume hoods. It’s a German manufacturer called Arias. You can contact them at arias.de
@@clausnielsen4903 thank you
Hello, I am BRS TECHNOLOGY, a semiconductor company in Korea. I would like to know if you have DAD-321 and do you sell it. My email address is brsjh@brstech.co.kr
Well done! I use this saw every day. Signed : a french from hell.
What the difference between take a picture with pixel avg, line avg and continous avg?
The aperture align and stigmation correction is always do in Pixel Avg?
The plant I work at has 40000 gallons of it
that stuff almost killed me, some bozo plant engineer connected a heated wet bench with 4% TMAH to a heat exhaust system, I got a lung full of vapor, ended up in the emergency room 3 days later, bp 188/118 at 130 bpm took 3 days to manifest, a little more and i would have had a heart attack, I`m lucky to be alive, do not underestimate the danger of this substance
What plant were you at ?
@@RoMan-lf8tc what plant was you working at ?
@@MerrittOutdoor semiconductor plant in Palm Bay Florida
@@RoMan-lf8tc I worked around it at a Basf chemical plant
Are they required to have remote lockouts?
where's your mask buddy?
Der er ikke et masket :)
Very helpful!
Where's part 3?
Great tutorial videos. Thanks for uploading.
Our pleasure!
Nice Video, thanks ！